The design pattern which has the color tone evaluation method of the design pattern which color is done and

摘要

PROBLEM TO BE SOLVED: To provide a method and device for evaluating tint where the tint in an inspection region on an object surface where a design pattern is provided in color with dot-like color elements is precisely evaluated.;SOLUTION: An object surface T where the design pattern containing dot-like color elements is provided is color is scanned by a spectrograph 1 to take in the image of the design pattern. The image which is taken in is so divided into interest sight fields V as the dot-like color elements are evenly contained, which is calculated to acquire a tint mean value for each interest sight field V. The mean value is checked for upper and lower limits as well as variation to judge correctness of the tint in the design pattern.;COPYRIGHT: (C)2002,JPO