Negative optical image-forming layer bottom anti-reflective coating application is the United States provisional application No. filed on January 9, 2002 It is one that claims the benefit of 60 / No. 347,135.

摘要

In negative-acting photoimageable bottom layer anti-reflective coating composition is coated under the negative photoresist and can be developed with an alkaline developer, The invention relates to light is the antireflective coating composition characterized in that the acid generator, a crosslinking agent and is made of alkali-soluble polymer, on the composition.