THIN-FILM RESONATOR, METHOD FOR PRODUCING THIN-FILM RESONATOR AND FILTER HAVING THE THIN-FILM RESONATOR

摘要

PROBLEM TO BE SOLVED: To provide a thin-film resonator, by which a production of a precise filter can be easily performed, the filter having this, and to provide a method of producing the thin film resonator.;SOLUTION: The thin-film resonator has a membrane layer, a mass loading layer, a lower electrode layer, a piezoelectric layer and an upper electrode layer. The membrane layer is laminated on a top surface of a substrate. The mass loading layer is laminated so as to cover a part of the top surface of the membrane layer. The lower electrode layer is laminated on the top of the mass loading layer. The piezoelectric layer is laminated on the top of the lower electrode layer. The upper electrode layer is laminated on the top surface of the piezoelectric layer.;COPYRIGHT: (C)2005,JPO&NCIPI