POLYREACTIVE CYCLIC SILICATE COMPOUND, SILOXANE POLYMER MANUFACTURED THEREFROM, AND METHOD FOR MANUFACTURING INSULATING FILM WITH SILOXANE POLYMER

摘要

PROBLEM TO BE SOLVED: To provide a polyreactive silicate compound for manufacturing an insulating film with excellent mechanical properties, thermal stability, insulating characteristics and crack resistance.;SOLUTION: The insulating film with excellent properties is manufactured using the polyreactive cyclic silicate compound represented by chemical formula 1 wherein R₁ is a hydrogen atom, a 1-3C alkyl group, R'CO (R' is a 1-3C alkyl group) or SiX₁X₂X₃ (X₁, X₂ and X₃ are each a hydrogen atom, a 1-3C alkyl group, a 1-10C alkoxy group or a halogen atom, and at least one of them is a hydrolyzable functional group), and p is an integer of 3-8.;COPYRIGHT: (C)2005,JPO&NCIPI