Measurement system and moire method for measuring the distortion of the optical imaging system

摘要

Providing a measurement system and the corresponding moiré how to be able to measure with measurement accuracy and high speed image distortion different directions present invention relates more. In the measurement system and moiré method for measuring aberrations of [SOLUTION] optical imaging system, to place the object grating with an object pattern in an object plane of the imaging system. I want to place the image grating having an image pattern on the image plane of the image forming system. Each have a large number of cells provided with a small grid of the grid different characteristics, it is projected to the image pattern on by the image forming system the object pattern, and the image of the small grid of the object pattern, image and pattern object pattern each are overlapped at least partially in the small grid pattern corresponding to the image, to produce a moire pattern small accordingly, and adapt to each other the image pattern and the pattern object. I detect a small moire pattern. I will evaluate the moire pattern small.