The optical component and the optical component and the method of estimating the efficiency of optical system

摘要

The method of estimating the efficiency of the optical component of the optical system which uses method, and the excimer laser which produce the optical component and the optical component is disclosed. You can use for the design of the optical system which uses the excimer laser these methods. As for these methods, the fact that wave length change of the glass sample in the operating wavelength of optical system is measured is included.