HEATING/ COOLING METHOD, PROCESS FOR MANUFACTURING IMAGE DISPLAY DEVICE, HEATING/COOLING DEVICE AND HEATING/ COOLING TREATMENT DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a heating/cooling method which can perform heating and cooling of a substrate at a high speed, a process for manufacturing an image display device, a heating/ cooling device and a heating/ cooling treatment device.;SOLUTION: When a substrate 3 is arranged in a chamber 6, a gas in the chamber 6 is discharged to form a reduced pressure atmosphere in the chamber 6. Subsequently, a heating element 4 generates heat to subject the substrate 3 to heating treatment. When the heating element 4 generates heat, heat directed toward a heat reflecting member 5 among the heat generated from the heating element 4 is reflected by the heat reflecting member 5 so that the reflected heat heats the substrate 3. When the heating treatment is finished, the heat reflecting member 5 moves in the direction indicated by the arrow A, and then, the heat reflecting member 5 does not exist between the heating element 4 and a cooling plate 7. In addition, the heat generation of the heating element 4 stops. Accordingly, the substrate 3 is cooled by the cooling plate 7.;COPYRIGHT: (C)2005,JPO&NCIPI