ROTOR ATTITUDE ANGLE MEASURING DEICE OF MULTI-DEGREES OF FREEDOM ULTRASONIC MOTOR

摘要

PROBLEM TO BE SOLVED: To provide a rotor attitude angle measuring device of a multi-degrees of freedom ultrasonic motor, capable of measuring an attitude angle at high precision with no noise while a wide movable range of a rotor is assured, for an extended period.;SOLUTION: The featuristic configuration includes a rotor housing/holding member 4 which applies a downward and constant pre-stress to a rotor 3 so that the rotor 3 is pressure-contacted to the upper surface of a stator 2 for rotation around axis and axial inclination movement, a plurality of elastic bodies 5, 5,... for reducing and compensating an inclined load torque generated at a load weight object γ pivoted above, in vertical direction, the rotor 3 according to the axial inclination movement of the rotor 3 with a couple of forces in opposite direction, a rotary encoder 7 which measures relative axial rotation angle of the rotor 3 against the rotor housing/holding member 4, and first and second laser range finding sensors 8a and 8b for measuring the shortest distances between two measuring reference points set in an installation coordinate system of the stator 2 and two measuring object points set in the rotor housing/holding member 4.;COPYRIGHT: (C)2005,JPO&NCIPI