The pyroelectricity body thin film and the substrate which possesses its production manner, and the pyroelectricity body thin film of

摘要

PROBLEM TO BE SOLVED: To obtain a thin film of pyroelectric substance suppressed in increase in dielectric constant and increased in only a pyroelectric coefficient. ;SOLUTION: This erroelectric substance thin film element is orientated ≥90% in the c-axis of perovskite type structure of tetragonal system formed on a substrate and has ≥90% film density and the constitution of (c₁-c₀)/c₀≤0.45% when the lattice constant of the c-axis of the erroelectric substance thin film is c₁ and that of a bulk material having the same composition as that of the erroelectric substance is c₀.;COPYRIGHT: (C)1997,JPO