METHOD FOR REFORMING SUBSTRATE AND SUBSTRATE SURFACE WITHOUT IMPAIRING SMOOTHNESS

摘要

PROBLEM TO BE SOLVED: To provide a method for reforming the surface of mica, while keeping a smoothness of the surface to the molecular level so that the mica can fit to an application of evaluating/observing an object.;SOLUTION: The method for reforming the mica surface includes coupling the surface with a silane compound in a nitrogen atmosphere, wherein the silane compound consists of only silanes arranging: one substituent for a methyl group; at least one substituent among remaining three substituents for a methoxy group, an ethoxy group, or a chloro group; and further remaining two substituents for the methoxy group, the ethoxy group, the chloro group or the methyl group so that the total number of the groups can be two and two substituents may be constituted of the same group or each different group. Thereby, the mica surface is reformed without impairing the smoothness.;COPYRIGHT: (C)2005,JPO&NCIPI