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Surface plasmon optical device and light emitting surface plasmon source for photolithography
Surface plasmon optical device and light emitting surface plasmon source for photolithography
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机译:用于光刻的表面等离子体激元光学器件和发光表面等离子体激元源
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摘要
Disclosed is a surface plasmon optic device that has a periodic array of apertures in a dielectric substrate and a metal film formed on the dielectric substrate and emits light from metal-air interface. The surface plasmon optic device includes a surface plasmon generating apparatus, a surface plasmon detecting apparatus, a surface plasmon controlling apparatus, an etching apparatus, etc. if a metal diffraction grating is disposed on the metal film having a well-defined interface, propagation of the surface plasmon can be efficiently reflected, divided and controlled. Further, radiating surface plasmon having a half period of a lattice constant formed at air-metal ( 1, 0 ) can be preserved at a distance of at least a few micron.
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