Spatial coherent equalization of the emission beam and print and inspection of pattern on the suffering work

摘要

This invention spatially coherent the emission beam (11) regards the device in order to equalize spatial intensity distribution. This device the diffraction grating which coherent is made to arrange spatially inside propagation path of the emission beam (13) being, makes the coherent beam diffract, propagation direction of the emission beam in the direction which crosses with this, in order to form the emission beam which possesses the spatial intensity distribution which it equalizes the diffraction grating in order to make decrease vis-a-vis the width of the emission beam in coherence length of the emission beam which it made diffract that orthogonal direction (13) with, the emission beam which was made to diffract only division superposes each part which this spatially is separated in each part which is separated spatially and with thisEmission division/the arrangement for direction appointment which is arranged inside propagation path of the emission beam which it made diffract (15, 17 and 19) with, it includes.