Drive control manner and Drive control unit null of the horizontal bidirectional

摘要

PROBLEM TO BE SOLVED: To reduce loads working on bearings to achieve a reduction of manufacturing cost and extension of device life and to provide a control device excellent in control performance by eliminating torsional moments that occur in the movable parts of the device. ;SOLUTION: This drive control device includes a movable member 10 that makes rectilinear movements in first and second mutually perpendicular horizontal directions and actuators 14, 15, 18, 19, provided by a plural number for each of the first and second directions, for imparting thrusts to the movable member 10. In this case, from all the necessary thrusts FX, FY imparted to the movable member 10 for the first and second directions and from the displacements ΔX, ΔY of the movable member 10 in the first and second directions, a plurality of distributed thrusts fx1, fx2, fY1, fY2 that match the number of actuators 14, 15, 18, 19, such that the sum of the moments of the movable member 10 around its center of gravity within a horizontal plane becomes zero, are computed by a distributed thrust computing device 22, and the drive of each actuator 14, 15, 18, 19 is controlled so that the distributed thrusts are produced.;COPYRIGHT: (C)1998,JPO