Sensing method and acoustic signal sensing device using a micromachine technology

摘要

Acoustic device comprising a processing circuit and an acoustic sensor. Acoustic sensor includes a hot-wire anemometer with a microphone having a microphone diaphragm is supported by the base, the base, the heat rays of the elongate member and a pair supported by the base. Hot-wire extension member of a set, define a plane substantially parallel to the microphone diaphragm. Sound pressure signal which includes a wind pressure signals from the microphone, and receives the velocity signal from the hot wire anemometer, based on the received signal, the processing circuitry generates an output signal (for example, the exact sound remove wind noise) the to. Linear thermal expansion member of a pair defining a plane substantially parallel to the microphone diaphragm is, since it is possible to form the MEMS device easily and is suitable for application to small devices.