Decisive manner of systematic error of surface form system of measurement and the suffering inspection body which

摘要

PROBLEM TO BE SOLVED: To obtain a method for determining system errors of a surface shape-measuring system, and a surface-shape measuring apparatus, whereby shift errors associated with shifts can be separated from surface information of a body to be detected by a practicable number of shift times.;SOLUTION: The surface-shape measuring apparatus has an area sensor for measuring an upper height and a lower height in a two-dimensional region of the body to be detected. The measuring apparatus is calibrated by an algorithm for determining the system error of the surface-shape measuring system for each detection position of a surface of the body to be detected, by using measured values of a vertical movement term among shift errors of several shifts, and of pitching, rolling and vertical movements generated in association with each shift which are obtained with the use of a plurality of gap sensors, while a normal face to be detected is fixed to a two-dimensional positioning stage movable in directions orthogonal to the vertical axis, and by subtracting the system error from a calculated shape including the system error obtained from a measured value of the body to be detected. When the shape of the other body to be detected is to be measured, calculated shape of the surface shape of the body to be detected is obtained highly accurately, without using the two-dimensional positioning stage for shifting (without depending on the shift of the body to be detected).;COPYRIGHT: (C)2002,JPO