Being the x-ray mask blank which possesses the x-ray absorption film which with respect to x-ray mask blank and

摘要

There is disclosed an X-ray mask comprising, on a support substrate 11a, an X-ray transmission film 12 for transmitting X-rays and an X-ray absorber pattern 13a formed on the X-ray transmission film 12 for absorbing the X-rays. The X-ray absorber pattern 13a is formed of a material which contains tantalum, boron, nitrogen and/or oxygen.