Production manner of the carbide of the tantalum which features that production manner of the carbide of tantalum and the carbide of tantalum,

摘要

PPROBLEM TO BE SOLVED: To provide a method of manufacturing tantalum carbide capable of easily forming a tantalum carbide having a required shape and a uniform thickness when tantalum carbide is used for coating the surface of an article, which is not peeled off by a thermal history, tantalum carbide obtained by the method, and wiring lines and electrodes of tantalum carbide. PSOLUTION: The tantalum carbide is formed on the surface of tantalum or a tantalum alloy by placing the tantalum or the tantalum alloy in a vacuum heat treatment furnace, heat-treating the tantalum or the tantalum alloy under a condition where a natural oxide film of TaSB2/SBOSB5/SBis sublimated and removed, introducing a carbon source into the vacuum heat treatment furnace, and then heat-treating. PCOPYRIGHT: (C)2005,JPO&NCIPI