Inclination angle measurement methods of making and the inclination angle sensor as well as the inclination angle sensor,

摘要

Providing a tilt angle sensor which can not be etched selectively to the substrate formed with piezoresistive, to measure the inclination angle by using the piezoelectric effect. The ground uniformly to a possible thickness deflection, which supports both ends of the silicon substrate 1 by the second support member, a back surface of the silicon substrate 1 formed piezoresistive R1~R4, the convex portion 3a in the center of the silicon substrate 1 providing the weight member 3 through.