Solid surface adsorption evaluation method of pollutants

摘要

PROBLEM TO BE SOLVED: To provide a solid surface adsorption evaluating method for a contaminant allowing easy handling in pretreatment and easy evaluation, preventing a test piece from pollution in conveyance and storage, and dispensing with large equipment required conventionally in spite of usage a wafer itself for performing precise measurement and evaluation.;SOLUTION: In formation of the test piece made of the same material as a workpiece, the size of the test piece is set to allow its storage in an adsorption tube container mountable on a gas chromatograph mass spectrometer. The test piece is collected after it is left in a measured point in the atmosphere inside a clean room for a predetermined time. The collected test piece is introduced into the gas chromatograph mass spectrometer (GC-MS device), and material and mass of the contaminant is measured for evaluating a degree of pollution in the measured point.;COPYRIGHT: (C)2001,JPO