Production method of dynamical pressure bearing, dynamical pressure bearing and dynamical pressure bearing production device

摘要

Mask 1 is cylindrical form, herringbone groove pattern is formed by the peripheral aspect, spiral groove pattern is formed to the underside of the brim section. Mask 1 is inserted in dynamical pressure bearing 2, furthermore, optical fiber 4 is inserted inside mask 1. And, irradiating light of the illuminant outside to mask 1 with optical fiber 4, it copies herringbone groove pattern to the inside perimeter aspect of dynamical pressure bearing 2. Simultaneously, irradiating light from above the brim section, it copies spiral groove pattern to the upper part surface of dynamical pressure bearing 2. The herringbone groove 21 is formed on the inside perimeter surface of bearing 2 development after doing, with etching, the spiral groove 22 is formed on the upper part surface.