Substrate inspection apparatus using a curved surface properties inspection method and this method

摘要

PROBLEM TO BE SOLVED: To perform a stable inspection using a lighting device and an imaging device that are the same as the conventional inspecting device also when a curved surface having diffusion reflection characteristics is to be recognized.;SOLUTION: In the printed circuit board inspecting device having a light source section 4 where light sources 8, 9, and 10 for emitting each color light of R, G, and B are arranged in different elevation angle directions, each brightness of R, G, and B is adjusted by an adjustment magnification that is registered in a memory 13, and an inspection is executed by an image after the adjustment. The adjustment magnification is set by using an image obtained by imaging a diffusion reflection plate that is installed at an inclination angle for detecting each color pattern of R, G, and B, and is set so that a color component corresponding to a color pattern to be obtained at the inclination angle becomes larger than other color components at any inclination angle.;COPYRIGHT: (C)2003,JPO