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Device information acquisition method and information acquisition device by time-of-flight secondary ion mass spectrometry
Device information acquisition method and information acquisition device by time-of-flight secondary ion mass spectrometry
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机译:飞行时间二次离子质谱仪的装置信息获取方法及信息获取装置
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摘要
A measurement method is provided, which enables to obtain a two-dimensional image with better quantitative-ability by suppressing the influence of the charging-up, when the two-dimensional secondary ion image is obtained for a biological-related material fixed on a substrate having high res
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