The optical control control equipment which has the yes deformation mirror, and the particular yes deformation mirror

摘要

The yes deformation mirror of this invention, baseplate 1, the plural minute mirrors becoming independent, drives each of 20 which when it is separated mutually are supported in baseplate 1 and plural minute mirrors, 20 each minute mirror has with the plural drive sections where controls the arrangement relationship of 20 and baseplate 1 between with that. As for each of the plural drive sections, the plural fixed electrodes with 5 which the drive voltage which becomes independent mutually can be impressed - 7 and in plural fixed electrodes the movable electrode 13 which is provided in the position where it opposes 5 - 7 - 15 it has. As for each minute mirror 20, in each of minute mirror 20 relation two which is attached movable electrodes 13 - 15 it is connected at least. Displacement to vertical direction and/or is possible the fact that the inclination for the aforementioned baseplate is done with the electrostatic force which occurs these movable electrodes of 13 - 15 and fixed electrode due to the potential difference between 5 - 7, vis-a-vis the baseplate 1 of each minute mirror 20.