And FET type sensor, the base sequence detection method and ion concentration detection method using the sensor

摘要

On the surface of a semiconductor substrate (1), the floating diffusion region, and (2) an input diode portion comprising a diffusion region of opposite type to the substrate (3), insulating film and before the floating diffusion region from the input diode section (5) above sensing unit comprising an ion sensitive film input gate which is fixed to the output gate (6) and (7), fixed to the insulating film of the input / output gate between (9), the other side of the floating diffusion and a reset gate, which is fixed to the insulating film at a position connected to the part (8), the reset diode part comprising a diffusion region of opposite type to the substrate formed on the opposite side of the floating diffusion region of the reset gate (4) , using the FET sensor for detecting an amount of charge the floating diffusion region are accumulated according to the number of pumping the depth of the potential well changes according to the ion concentration to be applied to the sensing section, the detection of the nucleotide sequence and the ion concentration detected perform.