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Compliant contact structures, contactor cards and test system including same, and methods of fabrication and use
Compliant contact structures, contactor cards and test system including same, and methods of fabrication and use
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机译:符合要求的接触结构,接触器卡和包括该接触器的测试系统以及制造和使用方法
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摘要
A compliant contact structure and contactor card for operably coupling with a semiconductor device to be tested includes a substantially planar substrate with a compliant contact formed therein. The compliant contact structure includes a portion fixed within the substrate and at least another portion integral with the fixed portion, laterally unsupported within a thickness of the substrate and extending beyond a side thereof. Dual-sided compliant contact structures, methods of forming compliant contact structures, a method of testing a semiconductor device and a testing system are also disclosed.
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