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Standard sample for transmission electron microscope (TEM) elemental mapping and TEM elemetal mapping method using the same
Standard sample for transmission electron microscope (TEM) elemental mapping and TEM elemetal mapping method using the same
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机译:透射电子显微镜(TEM)元素标测的标准样品和使用该样品的TEM金属元素标测方法
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摘要
A standard sample for transmission electron microscopy (TEM) elemental mapping and a TEM elemental mapping method using the same are provided. The standard sample includes a substrate; a first crystalline thin film containing heavy atoms formed on the substrate; a first amorphous thin film having oxides or nitrides containing light atoms and having a thickness of 1-5 nm or 6-10 nm formed on the first crystalline thin film; a second crystalline thin film containing heavy atoms formed on the first amorphous thin film. The standard sample can be used to correct TEM, EDS and EELS mapping results of a multi-layered nanometer-sized thin film and to optimize mapping conditions.
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