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Oxygen ion conductor device, method for fabricating oxygen ion conductor device, and oxygen concentration control system
Oxygen ion conductor device, method for fabricating oxygen ion conductor device, and oxygen concentration control system
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机译:氧离子导体装置,氧离子导体装置的制造方法以及氧浓度控制系统
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摘要
A first electrode thin film is formed on an upper surface of the oxygen ion conductive thin film so as to have a through hole. A resistor is formed on part of the upper surface of the oxygen conductive thin film located in the through hole. Thus, the oxygen ion conductive thin film can be directly heated by the resistor, so that oxygen ions can be speedily transferred with a low power. Therefore, the oxygen ion conductivity of the oxygen ion conductive thin film can be improved.
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