Method and apparatus for fabricating commercially feasible and structurally robust nanotube-based nanomechanical devices

摘要

A method and device for providing structurally robust and commercially feasible nanotube-based nanomechanical devices is provided. Specifically, a method of fabricating a carbon nanotube that is securely attached to a substrate, or atomic force microscopy tip, is provided by a process that uses silicide and palladium to secure the carbon nanotube to a commercially produced AFM cantilever, as well as self-aligning thin film deposition techniques.