首页> 外国专利> Imaginary polarizing measuring method for simultaneously measuring the optical crystal thickness and the optic axis direction

Imaginary polarizing measuring method for simultaneously measuring the optical crystal thickness and the optic axis direction

机译:同时测量光学晶体厚度和光轴方向的虚偏振测量方法

摘要

The present invention provides an imaginary optical measuring method that can simultaneously obtain both the thickness of optical crystals and the optic axis direction. The method utilizes a same polarimetry system to perform the rotating measurement of the analyzer. Some images of light intensity variation corresponding to different azimuth positions of the analyzer are obtained, and these images are performed a curve-fitting process to get the projected optic axis direction that the optic axis projecting on the specimen plane. Next, the rotating measurement of the specimen is performed to continuously adjust incident angles of the polarized light, and the optic axis direction in 3-dimentional space and the 2-dimentional distribution of the thickness are measured. Hence, the present invention can obtain both the thickness of optical crystals and the optic axis direction with only one measurement structure, and effects of low-cost, economy, convenient measurement, and accuracy are achieved.
机译:本发明提供了一种假想的光学测量方法,其可以同时获得光学晶体的厚度和光轴方向。该方法利用相同的极化系统来执行分析仪的旋转测量。获得与分析仪的不同方位角位置相对应的光强度变化的一些图像,并对这些图像进行曲线拟合处理,以得到光轴在样本平面上投影的投影光轴方向。接下来,进行样品的旋转测量以连续地调节偏振光的入射角,并且测量3维空间中的光轴方向和厚度的2维分布。因此,本发明仅用一种测量结构就可以同时获得光学晶体的厚度和光轴方向,并且可以获得低成本,经济,方便的测量和精度的效果。

著录项

  • 公开/公告号US2005243326A1

    专利类型

  • 公开/公告日2005-11-03

    原文格式PDF

  • 申请/专利权人 JUNG Y. HUANG;CHIEN-LI LEE;

    申请/专利号US20040862389

  • 发明设计人 CHIEN-LI LEE;JUNG Y. HUANG;

    申请日2004-06-08

  • 分类号G01B9/02;

  • 国家 US

  • 入库时间 2022-08-21 22:22:57

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号