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Stocker utilization self-balancing system and method
Stocker utilization self-balancing system and method
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机译:斯托克利用率自平衡系统和方法
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摘要
A method for operating a plurality of stockers, comprises the steps of: monitoring utilization of the plurality of stockers, each stocker capable of storing a plurality of wafer, LCD or reticle containers; and automatically transferring a first wafer, LCD or reticle container from a first one of the stockers to a second one of the stockers if the utilization of the first stocker is greater than a predetermined thereshold.
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