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System and method for using first-principles simulation to provide virtual sensors that facilitate a semiconductor manufacturing process
System and method for using first-principles simulation to provide virtual sensors that facilitate a semiconductor manufacturing process
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机译:使用第一原理仿真来提供有助于半导体制造过程的虚拟传感器的系统和方法
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摘要
A method, system, and computer readable medium for facilitating a process performed by a semiconductor processing tool. The method includes inputting data relating to a process performed by the semiconductor processing tool, and inputting a first principles physical model relating to the semiconductor processing tool. First principles simulation is performed using the input data and the physical model to provide a virtual sensor measurement relating to the process performed by the semiconductor processing tool, and the virtual sensor measurement is used to facilitate the process performed by the semiconductor processing tool.
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