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Processed object processing apparatus, processed object processing method, pressure control method, processed object transfer method, and transfer apparatus
Processed object processing apparatus, processed object processing method, pressure control method, processed object transfer method, and transfer apparatus
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机译:处理对象物处理装置,处理对象物处理方法,压力控制方法,处理对象物转移方法和转移装置
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摘要
A processed object processing apparatus which enables a plurality of processes to be carried out efficiently. A plurality of treatment systems are communicably connected together in a line and in which the objects to be processed are processed. A load lock system is communicably connected to the treatment systems and has a transfer mechanism that transfers the objects to be processed into and out of each of the treatment systems. At least one of the treatment systems is a vacuum treatment system, and the load lock system is disposed in a position such as to form a line with the treatment systems.
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