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Integrated micro-droplet generator

机译:集成式微滴发生器

摘要

A method for fabricating a thermal inkjet head equipped with a symmetrical heater and the head fabricated by the method are provided. The method incorporates two thick photoresist deposition processes and a nickel electroplating process. The first thick photoresist deposition process is carried out to form an ink chamber in fluid communication with a funnel-shaped manifold and an injector orifice. The second thick photoresist deposition process forms a mold for forming an injector passageway that leads to the injector orifice. The nickel electroplating process provides an orifice plate on top of the inkjet head through which an injector passageway that leads to the injector orifice is provided for injecting ink droplets.
机译:提供了一种制造配备有对称加热器的热喷墨头的方法以及通过该方法制造的头。该方法结合了两个厚的光致抗蚀剂沉积工艺和镍电镀工艺。进行第一厚光致抗蚀剂沉积工艺以形成与漏斗形歧管和喷射器孔流体连通的墨室。第二厚光致抗蚀剂沉积过程形成模具,该模具用于形成通向喷射器孔的喷射器通道。镍电镀工艺在喷墨头的顶部提供了一个孔板,通过该孔板提供了通向喷射器孔的喷射器通道以喷射墨滴。

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