Method of interferometry with modulated optical path-length difference and interferometer

摘要

An interferometer has a source for generating a first beam and a second beam of a coherent monochromatic light having a wavelength λ, optical elements for directing the beams through two different optical paths having a path-length difference, a detector for detection of an interference signal of the beams, and a modulator for additionally varying the path-length difference periodically to allow the interference signal be detected near a path-length difference of λ/4 periodically. A maximum intensity change in the interference signal caused by a small period change of the path-length difference is thus detectable. The maximum intensity change caused by varying the path-length difference by at least λ/2 may also be detectable. The interferometer may be used to measure small vibrations, without pre-calibration and/or a feedback servo system for keeping the path-length difference near λ/4.