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In-situ metalization monitoring using eddy current measurements during the process for removing the film
In-situ metalization monitoring using eddy current measurements during the process for removing the film
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机译:在去除膜的过程中使用涡流测量进行原位金属化监测
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摘要
A method for measuring conductance of a sample using an eddy current probe with a sensing coil. The method includes N repetitions of measuring first and second voltage pairs including in-phase and quadrature components of an induced AC voltage in the sensing coil, calibrating the first signal based on the measured second signal at a different separation from the sample and reference material, determining a conductance function relating conductance with location along the selected curve, processing the calibrated first voltage pairs to generate a lift-off curve, determining an intersection voltage pair representing intersection of the lift-off curve with a selected curve, and determining the conductance of the sample from the intersection voltage pair and the conductance function.
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