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Synthesis of chemically reactive ceria composite nanoparticles and CMP applications thereof
Synthesis of chemically reactive ceria composite nanoparticles and CMP applications thereof
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机译:化学反应性二氧化铈复合纳米粒子的合成及其CMP应用
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摘要
The present invention provides a method of synthesizing nanosized abrasive particles and methods of using the same in chemical mechanical polishing slurry applications. The nanosized abrasive particles according to the invention are produced by hydrothermal synthesis. The crystallites of the particles include cerium atoms and atoms of metals other than cerium. In a preferred embodiment of the invention, the crystallites exhibit a cubic crystal lattice structure. The differences in electric potential between the cerium atoms and the atoms of metals other than cerium facilitate the polishing of films without the need for chemical oxidizers.
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