Maintenance information management server maintenance information management system using the same, as well as method of managing maintenance information

摘要

A maintenance information management server stores: apparatus information related to apparatus name and apparatus model of semiconductor manufacturing apparatuses for each apparatus code; facility information about semiconductor manufacturing apparatuses installed in each factory/manufacturing line associated with the apparatus code; defect countermeasure information showing a content of a defect associated with the apparatus code; and defect countermeasure information. When defect information related to a semiconductor manufacturing apparatus installed in a factory/manufacturing line and countermeasure information to cope with the defect, as defect countermeasure information, are given, the maintenance information management server registers the defect countermeasure information based on the apparatus code and distributes the defect countermeasure information as maintenance information to all other factories/manufacturing lines having installed therein semiconductor manufacturing apparatuses with an apparatus code identical with that of the semiconductor manufacturing apparatus having the defect.