INK JET HEAD SUBSTRATE, INK JET HEAD, METHOD FOR MANUFACTURING INK JET HEAD SUBSTRATE, METHOD FOR MANUFACTURING INK JET HEAD, METHOD FOR USING INK JET HEAD AND INK JET RECORDING APPARATUS

摘要

TEXT OF THE ABSTRACTThe present invention provides an ink jet head substrate comprising a heat generating resistance member [24] forminga heat generating portion [21], an electrode wiring [22] electrically connected to the heat generating resistancemember, and an anti-cavitation film [26, 27] provided on the heat generating resistance member and the electrodewiring via an insulation protection layer [25], and wherein the anti-cavitation film is formed from different materialswith more than two layers [26, [27.