High pressure microfluidic valve, has electrostatic actuator provided between pressure control units, chamber connected with pressure control units through inlet, and intermediate wafer and lower wafer formed with chamber

摘要

The valve has a lower wafer (1), an intermediate wafer (2) and a top wafer (3) formed with a deep recess (4) that is protruded into a deformable stopper membrane (5). A fluid inlet hole (10) and a fluid outlet hole (11) are formed in the top wafer. The intermediate wafer and the lower wafer are formed with a chamber (6) that is connected with pressure control units through an inlet (7). An electrostatic actuator (9) is provided between the pressure control units.