MANIPULATION OF MICROMETER-SIZED ELECTRONIC OBJECTS WITH LIQUID DROPLETS

摘要

A system for manipulating a small object (3) comprising a substrate to receive the small object (3), a liquid droplet (4), which carries the small object (3) on the substrate, and a pre-treated surface structure of the substrate in the vicinity (1,2) of the placement position (1) of the small object (3). The small objects (3) like silicon dies in the range from 100 down to 1 micrometer are fine-placed by an evaporating droplet (4). The dies will serve as active electronic elements in large-area displays and other applications.