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COLOR VARIATION COMPENSATION ALGORITHM FOR BRIGHT FIELD WAFER INSPECTION
COLOR VARIATION COMPENSATION ALGORITHM FOR BRIGHT FIELD WAFER INSPECTION
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机译:亮场晶圆检查的颜色变化补偿算法
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摘要
Gray level variations between images of dies produced using a bright filed inspection system may be measured to produce measured statistics; and one or more of those measured statistics applied as a correction factor for a difference image produced by a comparison of two of the images of dies. The measured statistics may be average gray level variations across one or more of the images of dies
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