PLASMA RADIATION SOURCE AND DEVICE FOR CREATING A GAS CURTAIN FOR PLASMA RADIATION SOURCES

摘要

The aim of the invention is to improve a plasma radiation source whereby distinctly increasing the serviceable life of the optics that is limited by the influence of debris. A gas curtain, through which the radiation (5) emanating from a source area inside a vacuum chamber (1), is emitted at a defined solid angle for suppressing debris along an axis (X-X) of the mean propagation direction of the radiation (5), starts as a radially oriented supersonic gas jet (7) from a booster nozzle (2) of a gas jet vacuum pump (3), said nozzle being placed on the axis (X-X), is oriented toward a annular mixing nozzle (8) of the gas jet vacuum pump (3), said mixing nozzle being arranged coaxial to the axis (X-X), and exits the vacuum chamber (1) via a diffuser (10). This makes source concepts with an optimal conversion efficiency, however, high debris available.