METHOD FOR MANUFACTURING MICRO-STRUCTURE CATALYTIC COMBUSTION TYPE GAS SENSOR, AND GAS SENSOR USING THE MICRO-STRUCTURE CATALYTIC COMBUSTION GAS SENSOR

摘要

Provided is a composite gas sensor provided with compensating device by miniaturizing a catalytic combustion sensor, and the object of the present invention is to provide a composite gas sensor to measure a gas reaction pattern more precisely than a semiconductor composite sensor. It is, therefore, an object of the present invention to provide a micro-structure catalytic combustion gas sensor, and sensing ability improved than using a single sensor by providing a composite gas sensor is integrated with the semiconductor in the catalytic combustion gas sensor, and the composite gas sensor which can sense a gas reaction pattern more precisely than semiconductor composite sensor. A gas sensor in accordance with another aspect of the present invention, includes: a substrate, two electrodes formed on the substrate; a heater electrically connected to two electrodes to supply a heat and the conducting line working as a gas sensing device; a catalytic combustible gas sensing material by coating an alumina carrier in the form of paste, wherein the alumina carrier is obtained by highly diffusing a catalyst on the conductive pattern; and at least one groove formed by etching portions of the substrate below the heaters to increase a thermal efficiency of the sensor. In accordance with present invention, there is provided a method for sensing a gas by using the composite gas sensor integrating the catalytic combustion gas sensor and the semiconductor gas sensor, including the steps of: operating semiconductor gas sensing unit at an initial operating environment if the sensor is turned on, and the operation of the sensor is started in order to sense a gas; identifying whether the gas is measured or not through the semiconductor gas sensing unit; operating the catalytic combustible gas sensing unit and the semiconductor gas sensing unit.