INTEGRATED ELECTROSTATIC PERISTALTIC PUMP METHOD AND APPARATUS

摘要

An electrostatic fluid regulating device and methods. The device has a substrate. The device also has a first electrode coupled to the substrate. The device has a polymer based diaphragm. A second electrode is coupled to the diaphragm. A polymer based fluid chamber is coupled to the diaphragm. The device also has an inlet coupled to the polymer based fluid chamber and an outlet coupled to the polymer based fluid chamber.