Verfahren und Vorrichtung für die gleichzeitige Messung der Dicke und der Temperatur von einer Oxydschicht

摘要

The method involves determining thickness of an oxide layer from spectral analysis of reflection factor given by the division of radiation spectrum reflected on covered substrate to incident radiation spectrum of a light source. Temperature is determined from intrinsic radiation spectrum of the substrate measured by spectrometer and the thickness. An independent claim is also included for an installation for implementing a method for measuring thickness and temperature of an oxide layer disposed on a metallic substrate.