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POLARIZED LIGHT APPLYING DEVICE FOR LIGHT ALIGNMENT, PARTICULARLY REGARDING TO EQUALIZING ALIGNMENT DIRECTION OF LIGHT ALIGNMENT FILM BY REDUCING MISALIGNMENT OF POLARIZING SHAFTS ON LIGHT FIELD
POLARIZED LIGHT APPLYING DEVICE FOR LIGHT ALIGNMENT, PARTICULARLY REGARDING TO EQUALIZING ALIGNMENT DIRECTION OF LIGHT ALIGNMENT FILM BY REDUCING MISALIGNMENT OF POLARIZING SHAFTS ON LIGHT FIELD
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机译:偏振光的偏振光应用装置,特别是通过减少光场上的偏振光轴的失准来均衡偏振光膜的对准方向
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摘要
PURPOSE: A polarized light applying device for light alignment is provided to equalize alignment direction of a light alignment film by reducing misalignment of polarizing shafts on a light field by arranging cylindrical lens groups in orthogonal direction. CONSTITUTION: Light emitted from a lamp(1), including ultraviolet rays, is condensed by a condenser(2) and is reflected by a first plane mirror(3) to be parallel light by an input lens(5) so that the parallel light enters a polarizing element(6). The light is separated by the polarizing element so that only P polarized light exits. The P polarized light enters an integrator lens(4) formed of a light incident lens group(41) and a light exit lens group(42). The light incident lens group includes a first cylindrical lens array(41a) arranging a plurality of cylindrical lenses and a second cylindrical lens array(41b) arranging a plurality of cylindrical lenses in direction orthogonal to the arrangement direction of the first cylindrical lens array. The P polarized light exited from the integrator lens is reflected by a second plane mirror(8) through a shutter(7) and becomes parallel light by a collimator lens(9) to be applied to a work(W) mounted on a work stage(WS).
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