SWINGING OBJECTIVE RETARDING IMMERSION LENS ELECTRON OPTICS FOCUSING, DEFLECTION AND SIGNAL COLLECTION SYSTEM AND METHOD

摘要

This invention relates to rotation speed dip object cylinder method, wherein, the lens comprises magnetic lens near generate magnetic field near sample to focus particle beam onto sample; the sample provides potential electrode for speed particle beam to reduce particle beam energy; multiple bias rotation system to make the sample scan for large range; the bias units are put to deceleration field with remaining one into magnetic lens chamber with property hole radium detection unit.