MICRO OPTIC FORMING METHOD AND DEVICE THEREOF TO PRODUCE THREE-DIMENSIONAL MICRO STRUCTURE BY LAYERING OPTICAL HARDENING RESIN TO BE HARDENED THROUGH ULTRAVIOLET LASER OR INFRARED LASER

摘要

PURPOSE: A micro optic forming method and a device thereof are provided to produce a three-dimensional micro structure by layering an optical hardening resin and to have a beam radius of certain micrometers by focusing a laser beam. CONSTITUTION: A micro optic forming device contains a laser light source(2), an optical system, a x-y axis stage(10) and a z axis stage(18). The optical system changes laser beams from the laser light source to focused laser beams having a certain micrometer radius by comprising a shutter(4), an ND filter(6), a beam expander(8), a mirror(22) and a lens(24). The x-y axis stage controls the course of the laser beams to an x axis and a y axis directions. The z-axis stage controls the sectional layer thickness of an optical hardening resin to be hardened by the laser beams. The sectional layer of the optical hardening resin is formed by irradiating the laser beams on the surface of the optical hardening resin through the x-y axis stage. The optical hardening resins are layered through the z-axis stage continuously. Finally, a three-dimensional micro optical hardening resin structure is formed. Thereby, the three-dimensional micro structures of various shapes are produced effectively.