4-AXIS XYamp;thgr; POSITIONING TABLE AND CONTROL METHOD THEREOF TO PREVENT DEFECT OF POSITION DECISION ACCURACY OF TABLE AND REDUCTION OF STRENGTH FOR HORIZONTAL LOAD

摘要

PURPOSE: A 4-axis XY&thgr; positioning table is provided to exactly decide the position of a table with a 4-axis by a new and simple control method. CONSTITUTION: A 4-axis XY&thgr; positioning table comprises a moving table(10), a worktable(20), four supporting devices, four linear driving devices(50) and a control device. The supporting devices supports the moving table to be relatively moved against the worktable in parallel with a table reference face. The linear driving device relatively moves the moving table against the worktable by directly driving the supporting device respectively. The control device calculates axial moving target values of four linear driving devices corresponding to an X, an Y and a &thgr; directions to be given for an optional defined position on the table reference face of the moving table. Then, the control device moves the moving table to a target position by comparing the moving speed of the supporting device with the axial moving target value to confirm a starting point and a finishing point of the supporting devices and by simultaneously driving the linear driving device.