PROCESSING METHOD AND PROCESSING SYSTEM USING SCATTEROMETRY FOR NON-DESTRUCTIVE EVALUATION OF SURFACE STRUCTURE OF PROCESSED WORKPIECE

摘要

PURPOSE: A processing method and a processing system are provided to non-destructively evaluate a surface structure of a workpiece after processing by using a scatterometry. CONSTITUTION: A system(1) for processing a workpiece includes a processing unit(10), an unnecessary portion remover(20), a surface structure evaluator(30), a carrier, and a controller(40). The unnecessary portion remover removes an unnecessary portion produced on a surface of the workpiece for which the predetermined processing has been performed. The surface structure evaluator evaluates a surface structure of the workpiece from which the unnecessary portion has been removed by the unnecessary portion remover. The carrier carries the workpiece into/out of each of the unnecessary portion remover and the surface structure evaluator. The controller controls the processing unit, the unnecessary portion remover, the surface structure evaluator, and the carrier.